JPH0187528U - - Google Patents
Info
- Publication number
- JPH0187528U JPH0187528U JP18457587U JP18457587U JPH0187528U JP H0187528 U JPH0187528 U JP H0187528U JP 18457587 U JP18457587 U JP 18457587U JP 18457587 U JP18457587 U JP 18457587U JP H0187528 U JPH0187528 U JP H0187528U
- Authority
- JP
- Japan
- Prior art keywords
- mark
- semiconductor substrate
- inspecting
- utility
- sides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000007689 inspection Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18457587U JPH0187528U (en]) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18457587U JPH0187528U (en]) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187528U true JPH0187528U (en]) | 1989-06-09 |
Family
ID=31475926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18457587U Pending JPH0187528U (en]) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187528U (en]) |
-
1987
- 1987-12-02 JP JP18457587U patent/JPH0187528U/ja active Pending